-
G3B-1 [Invited]
09:00-09:20
Strategies for enhancing near- and mid-infrared transmittance of transparent and plasma-resistant Y2O3-MgO nanocomposites for semiconductor manufacturing
*¸¶È£Áø1, ±èµµ°æ2, ±èÇÏ´Ã1, ±è¹ÌÁÖ1, °íÀç¿õ1, ÀÌÀç¿í1, ¹Ú¿µÁ¶1
1Çѱ¹Àç·á¿¬±¸¿ø, 2Çѱ¹°úÇбâ¼ú¿ø
-
ºÒ¼Ò°è ¿°À» ÅëÇÑ Y2O3 ³»ÇöóÁ Ç¥¸é°³Áú Ư¼º Æò°¡
ÀåȯÀ±1, *ÀÌÇö±Ç1
1±¹¸³±Ý¿À°ø°ú´ëÇб³
-
Study on Growth Mechanism of Ceramic Coatings with PEO for Electrostatic Chucks
KANG Won-Kyung1, JUNG Dong-Il1, *CHOI Hyun-Ju1
1Korea Automotive Technology Institute
-
ÇöóÁ ¿¡ÄªµÈ Al2O3, Y2O3, YAG ¼¼¶ó¹ÍÀÇ ¹Ì¼¼Á¶Á÷ ºñ±³
*ÀÌÀç¿í1, ±èÀººñ1, ±è¹ÌÁÖ1, ¸¶È£Áø1, ±èÇÏ´Ã1, °íÀç¿õ1, ¹Ú¿µÁ¶1
1Çѱ¹Àç·á¿¬±¸¿ø
-
¼½ºÆæ¼Ç Áø°ø ÇöóÁ °øÁ¤À» È°¿ëÇÑ ³»ÇöóÁ ÄÚÆà ¿¬±¸
°¿ëÁø1, ±èµµÇö1, À̼ºÈÆ1, *º¯ÀÀ¼±1
1Çѱ¹Àç·á¿¬±¸¿ø
-
Coupled thermodynamic modeling and experimental phase diagram study of the ZrO2/HfO2-B2O3-SiO2 system for the aerospace coating application
¹Ú½ÂÀç1, ¹ÚÁص¿1, ¹Ú¹Î¼ö2, *Á¤ÀÎÈ£1
1¼¿ï´ëÇб³, 2Çѱ¹Ç×°ø´ëÇб³
-
Mechanical and thermal expansion properties screening design of metal-matrix high-entropy carbide composites for extreme environments: Multi-scale simulation approach
KIM Myungjae1, *KIM Jiwoong1
1Soongsil University
-
±â°ø ¼öÃà Áß °î·ü ¿ªÀü ¹ß»ý Á¶°ÇÀ» °í·ÁÇÑ ¼öÃà ±¸µ¿·Â Æò°¡
¹é¿ë±Õ1, *¿À°æ½Ä1
1±¹¸³¾Èµ¿´ëÇб³
-
Critical plasma spray parameter(CPSP)¿¡ µû¸¥ MgAl2O4 ºñÇàÀÔÀÚ °Åµ¿°ú ÄÚÆà Ư¼º °£ »ó°ü°ü°è
±ÇÇѼÖ1, ¹Ú¿µÁø1, ±èµµÇö1, °¿ëÁø1, À¯¿¬¿ì1, *¹ÚÈÆ°ü1
1Çѱ¹Àç·á¿¬±¸¿ø
-
µ¥ÀÌÅÍ ±â¹Ý ¼¼¶ó¹Í ¼ÒÀç ÇöóÁ ÀúÇ×¼º Æò°¡ ¹× CF4 È¥ÇÕ ÇöóÁ ¹ÝÀÀ Ư¼º ºÐ¼®
À强±Ô1, ÃÖ°¡ÀÎ1, ÀüÁØÇõ£±,2, ±è¼±±æ1, ±èÇö¹Ì1, ±è½½±â1, *±èÇü±Ù1, *À̿켺1
1Çѱ¹ÀüÀÚ±â¼ú¿¬±¸¿ø, 2¼º±Õ°ü´ëÇб³
-
Fabrication of functionally graded multi-ceramic structure using digital light processing (DLP) 3D printing technique and passive in-line mixing
KIM Gyu-Nam1, JUNG Jae-Min1, JEON Jong-Won1, CHOE Gyu-Bin1, PARK Jae-hyung1, *KOH Young-Hag1
1Korea University
-
Corrosion Resistance of Fe- and Ni-based Alloys for Molten Salt Reactors According to Cr and Mo Contents
±è¼öÇü1, *À±¿µ¼ö1
1°¡Ãµ´ëÇб³